Institute of Microelectronics of Chinese Academy of Sciences
  Address: A-103 Microelectronics Building, No.3, Beitucheng West Rd, Chaoyang, Beijing. China
  Website: kw305.51.net
Phone:
+86 10 62049399
Fax:
+86 10 64038729
E-mail:
xcliuime.ac.cn
  Number of Staff --
  Equipment Types
Plasma etching equipment, Cell sputtering, Cell PECVD
Thin-film sputtering , Thin-film PECVD , Thin-film plasma etching equipment
  Parent Company --
  Products
  Last Update 18-01-2010  
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