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Institute of Microelectronics of Chinese Academy of Sciences |
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| Number of Staff | -- | |
| Equipment Types |
Plasma etching equipment, Cell sputtering, Cell PECVD
Thin-film sputtering , Thin-film PECVD , Thin-film plasma etching equipment
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| Parent Company | -- | |
| Products | ||
| Last Update | 18-01-2010 | |