Cell coating inspector, Cell vision inspector

Thin film optical inspection system , Thin film thickness measurer

Highlights:

• Modular Multiprocessor System for Defect Detection, Coating Layer Uniformity and Haze Optimization
• Fast and simultaneous measurement within process cycle time
• 16,000 points / 10 seconds on 2.2 m x 2.6 m size samples
• Offline Version available (Vertical Design)
• CIS/CIGS version with InGaAs cameras available
• Closed Loop feedback on every process step to control and optimize production

Description:

dr. schwab's inline version of FPI solar offers fast and accurate inspection and process control for the manufacturing of large scale thin film panels within cycle times of today's production lines. Equipped with dr. schwab's proprietary spectrometers, the FPI solar provides simultaneous thickness evaluation of multiple layers at nanoscale resolution plus spectral haze analysis of TCO for the complete surface in one pass, measuring within a few seconds.

A camera based inspection solution of dr. schwab's FPI solar is available as well, for thin film on glass substrate or foil. Serial arrangement of CCD line-scan cameras with up to 8 kpx, LED illumination at the appropriate wavelength and high resolution optics allow to detect the smallest local defect. According to customer requirements we can include camera based laser scribe inspection with resolution at micrometer scale for accurate evaluation of distance and width variation of scribe lines.

For CIS/CIGS based solar panels a special version equipped with InGaAs cameras is available.

Highlights:

• Inline evaluation of all properties on each wafer
• Measurement over the complete surface on each wafer
• Texture, layer thickness and color
• Correlation of texture and thickness with efficiency
• Closed loop functionality for process optimization
• Statistical analysis with Trend View and Comparison Module

Description:

dr. schwab's FPI wafer is a fast and reliable inline solution to examine texturing of uncoated wafers and thickness of SiN coating on mono- and polycrystalline silicon wafers. Equipped with our proprietary series of spectrometers it allows high-speed and high-resolution measurement to analyze the spectral reflectance of wafers within the cycle time of production. The results provide detailed information about degree and uniformity of texturing, coating thickness and color.The modular design of FPI wafer allows easy integration into any production line. The system combines high-precision measurement with closed loop feedback functionality, powerful data analysis and result presentation together with user-friendly operation.

Highlights:

• Defect detection and classification
• Surface texture and haze analysis
• Coating thickness of multiple stacked layers
• Simultaneous measurements of all properties
• Variable sample size and thickness
• Surface micro structure analysis by laser diffraction
• Statistical analysis with Trend View and Comparison Module

Description:

dr. schwab's offline inspection system FPI lab supplies precise full surface analysis for all kinds of flat panels like Solar Cells, OLED Lighting and Flat Panel Displays. Camera inspection reveals all kinds of local defects like scratches, flaws or bubbles. dr. schwab's proprietary series of spectrometers allows high-resolution layer thickness measurement over a wide thickness range. Both, camera inspection and spectrometer measurements are performed at the same time.

The FPI lab is a multi-purpose analysis tool, supporting uncoated and coated wafers as well as crystalline and thin film based solar cells and panels. Operating at nanoscale resolution, it provides in-depth measurement results for surface texture and haze, layer thickness and color.